The Japan Society of Applied Physics

11:00 〜 13:30

[PS-1-04] First-Principles Study on Shape Degradation during Oxidation Process for Three-Dimensional Structure Devices

Y. Yajima1, K. Shiraishi2,4, T. Endoh3,4, H. Kageshima1,4 (1.Shimane Univ. (Japan), 2.Nagoya Univ. (Japan), 3.Tohoku Univ. (Japan), 4.JST-ACCEL (Japan))

https://doi.org/10.7567/SSDM.2018.PS-1-04