The Japan Society of Applied Physics

11:00 AM - 1:30 PM

[PS-1-10] N+/P Hybrid Poly-Si Shell Structure Junctionless Field-Effect Transistors by Electron Beam Lithography Dosage Adjusted Method

M.J. Tsai1, Y.Y. Chiang1, Y.C. Wu1 (1.National Tsing Hua Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2018.PS-1-10