11:00 〜 13:30

[PS-1-10] N⁺/P Hybrid Poly-Si Shell Structure Junctionless Field-Effect Transistors by Electron Beam Lithography Dosage Adjusted Method

^○M.J. Tsai¹, Y.Y. Chiang¹, Y.C. Wu¹ (1.National Tsing Hua Univ. (Taiwan))

https://doi.org/10.7567/SSDM.2018.PS-1-10