11:00 〜 13:30

[PS-1-21] Improved Conductance Method for Interface Trap Density of ZrO2-Si interface

^○H.J. Lin^1,2 (1.National Chiao Tung Univ. (Taiwan), 2.Tohoku Univ. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-1-21