The Japan Society of Applied Physics

11:00 〜 13:30

[PS-1-22] Time-Dependent Selective Oxidation by Low Pressure Oxidation on High-Ge-Content SiGe

W.L. Lee1, J.L. Zhang1, S.Y. Wang1, M.L. Tsai1, G.L. Luo2, C.H. Chien1 (1.National Chiao Tung Univ. (Taiwan), 2.National Nano Device Labs. (Taiwan))

https://doi.org/10.7567/SSDM.2018.PS-1-22