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[PS-1-23] Identification of different gas-phase reaction modes of WF₆ with SiH₄ for deposition of WSi_n films: powder formation and WSi_n cluster synthesis

^○N. Okada¹, N. Uchida¹, S. Ogawa¹, T. Kanayama¹ (1.AIST (Japan))

https://doi.org/10.7567/SSDM.2018.PS-1-23