[No-Show]Effects of Microwave Annealing on IGZO Layer Deposited by AP-PECVD for RRAM Device

C.H. Wu

2018 International Conference on Solid State Devices and Materials

2018年9月9日〜 2018年9月13日
University of Tokyo

11:00 〜 13:30

[PS-10-06] [No-Show]Effects of Microwave Annealing on IGZO Layer Deposited by AP-PECVD for RRAM Device

^○C.H. Wu¹, K.M. Chang², S.N. Kuo², Y.C. Chiang², Y.X. Zhang², Y.M. Chen², W.Y. Liu² (1.Chung Hua Univ. (Taiwan), 2.National Chiao Tung Univ. (Taiwan))

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