Effects of cluster deposition on spatial profile of Si-H<sub>x</sub> bond density in a-Si:H films

11:00 〜 13:30

[PS-10-12] Effects of cluster deposition on spatial profile of Si-H_x bond density in a-Si:H films

^○K. Koga¹, K. Tanaka¹, H. Hara¹, S. Nagaishi¹, D. Yamashita¹, K. Kamataki¹, N. Itagaki¹, M. Shiratani¹ (1.Kyushu Univ. (Japan))