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[PS-10-12] Effects of cluster deposition on spatial profile of Si-H_x bond density in a-Si:H films

^○K. Koga¹, K. Tanaka¹, H. Hara¹, S. Nagaishi¹, D. Yamashita¹, K. Kamataki¹, N. Itagaki¹, M. Shiratani¹ (1.Kyushu Univ. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-10-12