The Japan Society of Applied Physics

11:00 AM - 1:30 PM

[PS-10-12] Effects of cluster deposition on spatial profile of Si-Hx bond density in a-Si:H films

K. Koga1, K. Tanaka1, H. Hara1, S. Nagaishi1, D. Yamashita1, K. Kamataki1, N. Itagaki1, M. Shiratani1 (1.Kyushu Univ. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-10-12