Impacts of doped element on ferroelectric phase stabilization in HfO<sub>2</sub> through non-equilibrium PDA

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[PS-10-18 (Late News)] Impacts of doped element on ferroelectric phase stabilization in HfO₂ through non-equilibrium PDA

^○Y. Mori¹, T. Nishimura¹, T. Yajima¹, S. Migita², A. Toriumi¹ (1.Univ. of Tokyo (Japan), 2.AIST (Japan))