The Japan Society of Applied Physics

11:00 AM - 1:30 PM

[PS-10-18 (Late News)] Impacts of doped element on ferroelectric phase stabilization in HfO2 through non-equilibrium PDA

Y. Mori1, T. Nishimura1, T. Yajima1, S. Migita2, A. Toriumi1 (1.Univ. of Tokyo (Japan), 2.AIST (Japan))

https://doi.org/10.7567/SSDM.2018.PS-10-18