The Japan Society of Applied Physics

11:00 〜 13:30

[PS-3-05] 4-Terminal Lateral MEMS Silicon Relay with Nanocrystalline Graphite Contact and Polymer Insulating/Mechanical Coupler

J.D. Reynolds1, S. Rana2, J. Mouro2, D. Pamunuwa2, H. Chong1 (1.Univ. of Southampton (UK), 2.Univ. of Bristol (UK))

https://doi.org/10.7567/SSDM.2018.PS-3-05