11:00 〜 13:30

[PS-3-05] 4-Terminal Lateral MEMS Silicon Relay with Nanocrystalline Graphite Contact and Polymer Insulating/Mechanical Coupler

^○J.D. Reynolds¹, S. Rana², J. Mouro², D. Pamunuwa², H. Chong¹ (1.Univ. of Southampton (UK), 2.Univ. of Bristol (UK))

https://doi.org/10.7567/SSDM.2018.PS-3-05