11:00 AM - 1:30 PM

[PS-3-07] Mapping of Ni/SiN_x/n-SiC Structure Using Scanning Internal Photoemission Microscopy

^○K. Shiojima¹, T. Hashizume¹, M. Sato², M.B. Takeyama² (1.Univ. of Fukui (Japan), 2.Kitami Inst. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-3-07