The Japan Society of Applied Physics

11:00 〜 13:30

[PS-3-10 (Late News)] Deposition of SiC Thin Films and Carbon Tips Growth onto SiC Thin Films for NSOM Applications

S.-H. Nam1, J.-H. Yu2, H.J. Seo2, D.I. Kim2, J.W. Lee1,2, R.H. Jeong1,2, Y.E. Gil2, J.-H. Boo1,2 (1.Inst. of Basic Sci., Sungkyunkwan Univ. (Korea), 2.Department of Chemistry, Sungkyunkwan Univ. (Korea))

https://doi.org/10.7567/SSDM.2018.PS-3-10