11:00 〜 13:30

[PS-4-02] Wet-chemical Cleaning of Epitaxial GaN(0001) Surfaces

^○L. Peng¹, A. Ohta¹, N.X. Truyen¹, M. Ikeda¹, K. Makihara¹, N. Taoka², T. Narita³, K. Itoh³, D. Kikuta³, K. Shiozaki⁴, T. Kachi⁴, S. Miyazaki¹ (1.Grad. School of Eng., Nagoya Univ. (Japan), 2.AIST GaN-OIL (Japan), 3.Toyota Central R&D Labs. (Japan), 4.IMaSS, Nagoya Univ. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-4-02