11:00 〜 13:30

[PS-4-05] Low Ohmic Contact Resistance on AlGaN/GaN Heterostructures Based on Ti/Al/Ti/TiN Metal Stacks

^○H. Sun¹, J. Chen², P. Liu¹, D. Chen¹ (1.Peking University (China), 2.Founder Microelectronics International Co., Ltd. (China))

https://doi.org/10.7567/SSDM.2018.PS-4-05