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[PS-4-13 (Late News)] Reuse process of sapphire substrates for GaN epitaxial growth using laser lift-off technique

^○I. Watanabe¹, S. Tabata², K. Takahashi², A. Kasamatsu¹ (1.NICT (Japan), 2.DISCO Corp. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-4-13