11:00 〜 13:30

[PS-4-23 (Late News)] Process Damage Influence for Electrical Property of Diamond Schottky Barrier Diodes

^○T. Murooka¹, K. Takizawa², Y. Kato³, T. Makino³, M. Ogura³, H. Kato³, R. Wada², S. Yamasaki³, T. Iwasaki¹, H. Nohira², M. Hatano¹ (1.Tokyo Tech (Japan), 2.Tokyo City Univ. (Japan), 3.AIST (Japan))

https://doi.org/10.7567/SSDM.2018.PS-4-23