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[PS-5-10] Nonalloyed Ohmic Contacts to Buried n-GaAs Appearing After Reversed Wafer Transfer Process

^○T. Mano¹, H.T. Miyazaki¹, T. Kasaya¹, T. Noda¹, Y. Sakuma¹ (1.NIMS (Japan))

https://doi.org/10.7567/SSDM.2018.PS-5-10