Improvement of photoresponsivity of passivated BaSi2 thin film layers by hydrogenated amorphous Si using radio-frequency H2 plasma

11:00 〜 13:30

[PS-6-14] Improvement of photoresponsivity of passivated BaSi2 thin film layers by hydrogenated amorphous Si using radio-frequency H2 plasma

^○Z. Xu¹, K. Gotoh², T. Deng¹, T. Sato¹, K. Toko¹, N. Usami², T. Suemasu¹ (1.Univ. of Tsukuba (Japan), 2.Nagoya. Univ (Japan))