The Japan Society of Applied Physics

11:00 〜 13:30

[PS-6-14] Improvement of photoresponsivity of passivated BaSi2 thin film layers by hydrogenated amorphous Si using radio-frequency H2 plasma

Z. Xu1, K. Gotoh2, T. Deng1, T. Sato1, K. Toko1, N. Usami2, T. Suemasu1 (1.Univ. of Tsukuba (Japan), 2.Nagoya. Univ (Japan))

https://doi.org/10.7567/SSDM.2018.PS-6-14