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[PS-6-17] Significant improvement of photoresponsivity of polycrystalline BaSi₂ films directly formed on heated Si(111) substrates by sputtering

^○S. Matsuno¹, R. Takabe¹, S. Yokoyama¹, K. Toko¹, M. Mesuda², H. Kuramochi², T. Suemasu¹ (1.Univ. of Tsukuba (Japan), 2.Tosoh Corp. (Japan))

https://doi.org/10.7567/SSDM.2018.PS-6-17