Selectivity modification of graphene-based ammonia gas detection by the substrate treated with CF<sub>4</sub> plasma

C.H. Huang

doi:https://doi.org/10.7567/SSDM.2018.PS-7-06

11:00 AM - 1:30 PM

[PS-7-06] Selectivity modification of graphene-based ammonia gas detection by the substrate treated with CF₄ plasma

^○C.H. Huang¹, T.C. Chen¹, C.M. Yang^2,3,4, C.S. Lai^2,3,4 (1.Department of Electronic Engineering, Chang Gung Univ. (Taiwan), 2.Inst. of Electro-Optical Engineering, Chang Gung Univ. (Taiwan), 3.Biosensor Group, Biomedical Engineering Research Center, Chang Gung Univ. (Taiwan), 4.Department of General Surgery, Chang Gung Memorial Hospital at Linkou (Taiwan))

https://doi.org/10.7567/SSDM.2018.PS-7-06

2018 International Conference on Solid State Devices and Materials

[PS-7-06] Selectivity modification of graphene-based ammonia gas detection by the substrate treated with CF4 plasma

[PS-7-06] Selectivity modification of graphene-based ammonia gas detection by the substrate treated with CF₄ plasma