Influence of water vapor on CO detection using a resonant microcantilever functionalized by Al-doped ZnO nanorods

L. Aprilia

doi:https://doi.org/10.7567/SSDM.2018.PS-8-04

11:00 AM - 1:30 PM

[PS-8-04] Influence of water vapor on CO detection using a resonant microcantilever functionalized by Al-doped ZnO nanorods

^○L. Aprilia^1,2, M. Hosoda¹, R. Nuryadi³, Y. Neo¹, M.A. Barique¹, D. Hartanto², H. Mimura¹ (1.Shizuoka Univ. (Japan), 2.Univ. Indonesia (Indonesia), 3.BPPT (Indonesia))

https://doi.org/10.7567/SSDM.2018.PS-8-04

2018 International Conference on Solid State Devices and Materials

[PS-8-04] Influence of water vapor on CO detection using a resonant microcantilever functionalized by Al-doped ZnO nanorods