The Japan Society of Applied Physics

1:00 PM - 1:50 PM

[SC-B-04] Heterogeneous TFTs integration of IGZO and LTPS for a display backplane technology

J.H. Ye (AU Optronics Corp. (Taiwan))

Heterogeneous TFTs integration of IGZO and LTPS for a display backplane technology has advantages of exhibiting higher circuit efficiency and low power consumption in application. In this course, we will review recent IGZO and LTPS TFTs devices studies, respectively, and then discuss how to integrate those two heterogeneous TFTs on a display backplane. We will also summarize the key processes for fabricating LTPS TFTs and IGZO TFTs and heterogeneous TFTs hybrid of IGZO and LTPS. And we will discuss methods to evaluate device’s performance and relative issues of integration process which affects devices reliability. Finally, we will address the recent product development of the heterogeneous TFTs integration of IGZO and LTPS for a display backplane.