One of the essential components needed to realize the evolution of Si technology is the process equipment. As scaling continues into the 1x/1y/1z/1a generation in DRAM, low nm range in logic, and over 96 layers of stacked devices for VNAND, the requirements or “performance specifications” needed to deliver process technologies suitable for their production is, simply put, “incredible”. During the course, requirements for the device technology will be paired with process equipment technology so that the audience can quickly come to understand the current problems, challenges and solutions from an equipment supplier`s point of view. A deeper dive on the Si device evolution will be covered in the Advanced Si Devices lecture to be given by Maeda-san, and therefore the focus of this portion will be more on the process-equipment aspect of the technology.