4:51 PM - 4:52 PM

[PS-1-22] Time-Dependent Selective Oxidation by Low Pressure Oxidation on High-Ge-Content SiGe

^○W.L. Lee¹, J.L. Zhang¹, S.Y. Wang¹, M.L. Tsai¹, G.L. Luo², C.H. Chien¹ (1.National Chiao Tung Univ. (Taiwan), 2.National Nano Device Labs. (Taiwan))