2018 International Conference on Solid State Devices and Materials
2018年9月9日 〜 2018年9月13日 University of Tokyo
16:52 〜 16:53
[PS-1-23] Identification of different gas-phase reaction modes of WF6 with SiH4 for deposition of WSin films: powder formation and WSin cluster synthesis
○N. Okada1, N. Uchida1, S. Ogawa1, T. Kanayama1 (1.AIST (Japan))
