2018 International Conference on Solid State Devices and Materials
Sep 9, 2018 - Sep 13, 2018 University of Tokyo
4:30 PM - 4:31 PM
[PS-10-01] Reliability of 60-nm scale CAAC-IGZO FET
○H. Kimura1, D. Shimada1, N. Kamata1, M. Motoyoshi1, Y. Asami1, K. Sugaya1, R. Hodo1, T. Murakawa1, M. Takahashi1, S. Yamazaki1 (1.Semiconductor Energy Laboratory Co., Ltd. (Japan))
