4:35 PM - 4:36 PM

[PS-10-06] [No-Show]Effects of Microwave Annealing on IGZO Layer Deposited by AP-PECVD for RRAM Device

^○C.H. Wu¹, K.M. Chang², S.N. Kuo², Y.C. Chiang², Y.X. Zhang², Y.M. Chen², W.Y. Liu² (1.Chung Hua Univ. (Taiwan), 2.National Chiao Tung Univ. (Taiwan))