2018 International Conference on Solid State Devices and Materials

Sep 9, 2018 - Sep 13, 2018
University of Tokyo

4:41 PM - 4:42 PM

[PS-10-12] Effects of cluster deposition on spatial profile of Si-H_x bond density in a-Si:H films

^○K. Koga¹, K. Tanaka¹, H. Hara¹, S. Nagaishi¹, D. Yamashita¹, K. Kamataki¹, N. Itagaki¹, M. Shiratani¹ (1.Kyushu Univ. (Japan))

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