2018 International Conference on Solid State Devices and Materials

Sep 9, 2018 - Sep 13, 2018
University of Tokyo

4:51 PM - 4:52 PM

[PS-3-03] Characterization of TiN films sputter-deposited at low temperatures

^○M. Sato¹, H. Kitada¹, M.B. Takeyama¹ (1.Kitami Inst. of Tech. (Japan))

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