16:55 〜 16:56 [PS-3-07] Mapping of Ni/SiNx/n-SiC Structure Using Scanning Internal Photoemission Microscopy ○K. Shiojima1, T. Hashizume1, M. Sato2, M.B. Takeyama2 (1.Univ. of Fukui (Japan), 2.Kitami Inst. of Tech. (Japan))