Impact of Oxygen Radical Treatment on Improvement of Al<sub>2</sub>O<sub>3</sub>/SiC Interface

T. Doi

4:47 PM - 4:48 PM

[PS-4-18] Impact of Oxygen Radical Treatment on Improvement of Al₂O₃/SiC Interface

^○T. Doi^1,2, W. Takeuchi^1,3, M. Sakashita¹, N. Taoka², O. Nakatsuka^1,4, S. Zaima⁵ (1.Grad. Sch. of Eng., Nagoya Univ. (Japan), 2.AIST-NU GaN-OIL (Japan), 3.Aichi Inst. of Tech. (Japan), 4.IMaSS, Nagoya Univ. (Japan), 5.Inst. of innovation for Future Society, Nagoya Univ. (Japan))

2018 International Conference on Solid State Devices and Materials

[PS-4-18] Impact of Oxygen Radical Treatment on Improvement of Al2O3/SiC Interface

[PS-4-18] Impact of Oxygen Radical Treatment on Improvement of Al₂O₃/SiC Interface