16:56 〜 16:57

[PS-5-09] The Si₃N₄ Liner Stressor for Performance Improvement of Tensile-Strained GeSn/SiGeSn Multiple Quantum Well Laser

^○C. Fang¹, Y. Liu¹, X. Gao¹, G. Han¹, Q. Zhang³, Y. Shao², J. Zhang¹, Y. Hao¹ (1.Wide Bandgap Semiconductor Technology Disciplines State Key Labs, School of Microelectronics, Xidian Univ. (China), 2.State Key Lab. of Power Grid Security and Energy Conservation, China Electric Power Research Inst. (China), 3.School of Electric and Information Engineering, Zhengzhou University of Light Industry and Key Lab. for Informatization Electrical Appliances of Henan Province (China))