The Japan Society of Applied Physics

4:50 PM - 4:51 PM

[PS-6-21 (Late News)] Charge and Discharge Characteristics of On-chip CeOx Electric Double Layer Decoupling Capacitors

K. Hisatsune1, Y. Takaku1, K. Sasa1, T. Hoshii1, I. Muneta1, H. Wakabayashi1, K. Tsutsui1, K. Kakushima1 (1.Tokyo Tech (Japan))