16:50 〜 16:51
[PS-6-21 (Late News)] Charge and Discharge Characteristics of On-chip CeOx Electric Double Layer Decoupling Capacitors
○K. Hisatsune1, Y. Takaku1, K. Sasa1, T. Hoshii1, I. Muneta1, H. Wakabayashi1, K. Tsutsui1, K. Kakushima1
(1.Tokyo Tech (Japan))