Selectivity modification of graphene-based ammonia gas detection by the substrate treated with CF<sub>4</sub> plasma

C.H. Huang

16:35 〜 16:36

[PS-7-06] Selectivity modification of graphene-based ammonia gas detection by the substrate treated with CF₄ plasma

^○C.H. Huang¹, T.C. Chen¹, C.M. Yang^2,3,4, C.S. Lai^2,3,4 (1.Department of Electronic Engineering, Chang Gung Univ. (Taiwan), 2.Inst. of Electro-Optical Engineering, Chang Gung Univ. (Taiwan), 3.Biosensor Group, Biomedical Engineering Research Center, Chang Gung Univ. (Taiwan), 4.Department of General Surgery, Chang Gung Memorial Hospital at Linkou (Taiwan))

2018 International Conference on Solid State Devices and Materials

[PS-7-06] Selectivity modification of graphene-based ammonia gas detection by the substrate treated with CF4 plasma

[PS-7-06] Selectivity modification of graphene-based ammonia gas detection by the substrate treated with CF₄ plasma