The Japan Society of Applied Physics

[E-7-03] Molecular beam epitaxial growth and characterization of coherent α-Al2O3/Ga2O3 superlattices on r-plane sapphire

Y. Kato1, M. Imura2, Y. Nakayama2, M. Takeguchi2, E. Kobayashi3, K. Takahashi4, T. Oshima1 (1.Electrical and Electronic Engineering, Saga Univ. (Japan), 2.National Institute for Materials Science (Japan), 3.Kyushu Synchrotron Light Research Center (Japan), 4.Synchrotron Light Application Center, Saga Univ. (Japan))

2018 International Conference on Solid State Devices and Materials |Thu. Sep 13, 2018 10:00 AM - 10:15 AM |PDF Download