The Japan Society of Applied Physics

[PS-4-02] Wet-chemical Cleaning of Epitaxial GaN(0001) Surfaces

L. Peng1, A. Ohta1, N.X. Truyen1, M. Ikeda1, K. Makihara1, N. Taoka2, T. Narita3, K. Itoh3, D. Kikuta3, K. Shiozaki4, T. Kachi4, S. Miyazaki1 (1.Grad. School of Eng., Nagoya Univ. (Japan), 2.AIST GaN-OIL (Japan), 3.Toyota Central R&D Labs. (Japan), 4.IMaSS, Nagoya Univ. (Japan))

2018 International Conference on Solid State Devices and Materials |Wed. Sep 12, 2018 4:31 PM - 4:32 PM |PDF Download