The Japan Society of Applied Physics

[J-2-03] Simplified and Disposal CMOS Chip Fabrication for Biomedical Application

T. Tabei1, T. Sato1, T. Meguro1, K. Okada1, S. Yamada1, Y. Amemiya1, S. Yokoyama1, A. Nakamura2, H. Murakami2, S. Nishimura3, K. Miyao3, S. Makihira3, R. Shimizu3, R. Mihara3, M. Furuse3 (1.Res. Inst. for Nanodevice and Bio Syst., Hiroshima Univ. (Japan), 2.National Inst. of Tech., Kurume College (Japan), 3.National Inst. of Tech., Oshima College (Japan))

2018 International Conference on Solid State Devices and Materials |Tue. Sep 11, 2018 4:30 PM - 4:45 PM |PDF Download