The Japan Society of Applied Physics

10:15 〜 10:30

[B-3-03] Silicon Photonics Co-integrated with Silicon Nitride for Optical Phased Arrays

A. Marinins1, S.P. Dwivedi1, J. Ø. Kjellman1, S. Kerman, T. David1, B. Figeys1, R. Jansen1, D.S. Tezcan1, X. Rottenberg1, P. Soussan1 (1.imec (Belgium))

https://doi.org/10.7567/SSDM.2019.B-3-03