Silicon Photonics Co-integrated with Silicon Nitride for Optical Phased Arrays

A. Marinins

doi:https://doi.org/10.7567/SSDM.2019.B-3-03

10:15 AM - 10:30 AM

[B-3-03] Silicon Photonics Co-integrated with Silicon Nitride for Optical Phased Arrays

^○A. Marinins¹, S.P. Dwivedi¹, J. Ø. Kjellman¹, S. Kerman, T. David¹, B. Figeys¹, R. Jansen¹, D.S. Tezcan¹, X. Rottenberg¹, P. Soussan¹ (1.imec (Belgium))

https://doi.org/10.7567/SSDM.2019.B-3-03

2019 International Conference on Solid State Devices and Materials

[B-3-03] Silicon Photonics Co-integrated with Silicon Nitride for Optical Phased Arrays