10:15 AM - 10:30 AM

[D-3-05] FABRICATION OF TENSILE STRAIN APPLYING STRUCTURE TO SUSPENDED GRAPHENE FOR NANOMECHANICAL RESONATOR WITH HIGH FQ PRODUCT

^○J. Uesaka¹, K. Go¹, S. Kidane¹, K. Sawada¹, K. Takahashi¹ (1.Toyohashi Univ. of Tech. (Japan))

https://doi.org/10.7567/SSDM.2019.D-3-05