FABRICATION OF TENSILE STRAIN APPLYING STRUCTURE TO SUSPENDED GRAPHENE FOR NANOMECHANICAL RESONATOR WITH HIGH FQ PRODUCT

10:15 〜 10:30

[D-3-05] FABRICATION OF TENSILE STRAIN APPLYING STRUCTURE TO SUSPENDED GRAPHENE FOR NANOMECHANICAL RESONATOR WITH HIGH FQ PRODUCT

^○J. Uesaka¹, K. Go¹, S. Kidane¹, K. Sawada¹, K. Takahashi¹ (1.Toyohashi Univ. of Tech. (Japan))