14:00 〜 14:30

[F-1-01 (Invited)] Nanoscale 3-dimensional characterization of wide bandgap power and microdevices

^○L.J. Brillson¹, H. Gao¹, C.H. Lin², G. Foster³, J. Cox⁴ (1.The Ohio State Univ. (USA), 2.Intel Corporation (USA), 3.U.S. Naval Research Laboratory (USA), 4.Univ. of California, Los Angeles (USA))

https://doi.org/10.7567/SSDM.2019.F-1-01