The Japan Society of Applied Physics

14:00 〜 14:30

[F-1-01 (Invited)] Nanoscale 3-dimensional characterization of wide bandgap power and microdevices

L.J. Brillson1, H. Gao1, C.H. Lin2, G. Foster3, J. Cox4 (1.The Ohio State Univ. (USA), 2.Intel Corporation (USA), 3.U.S. Naval Research Laboratory (USA), 4.Univ. of California, Los Angeles (USA))

https://doi.org/10.7567/SSDM.2019.F-1-01