14:00 〜 14:30
[F-1-01 (Invited)] Nanoscale 3-dimensional characterization of wide bandgap power and microdevices
○L.J. Brillson1, H. Gao1, C.H. Lin2, G. Foster3, J. Cox4
(1.The Ohio State Univ. (USA), 2.Intel Corporation (USA), 3.U.S. Naval Research Laboratory (USA), 4.Univ. of California, Los Angeles (USA))
https://doi.org/10.7567/SSDM.2019.F-1-01