Round-Robin Test of Photoluminescence Method after Electron Irradiation for Quantifying Low-Level Carbon in Silicon

15:00 〜 15:15

[F-1-03] Round-Robin Test of Photoluminescence Method after Electron Irradiation for Quantifying Low-Level Carbon in Silicon

^○M. Tajima¹, S. Samata¹, S. Nakagawa¹, J. Oriyama¹, N. Ishihara¹ (1.Japan Soc. Newer Metals (Japan))